Browsing by Subject "Annealing temperature"
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Article
Probing carrier dynamics in implanted and annealed polycrystalline silicon thin films using white light
(2006)Polycrystalline silicon thin film samples implanted and annealed at various temperatures have been studied using ultrafast laser pulse excitation. Nondegenerate pump-probe technique has been utilized to investigate carrier ...
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Article
Study of the annealing kinetic effect and implantation energy on phosphorus-implanted silicon wafers using spectroscopic ellipsometry
(2006)In this work, we have studied the changes in the optical properties on crystalline silicon implanted wafers (1 × 1013-1 × 1016 P+/cm2) using an extensive ellipsometric analysis. The effects of implantation energy (20-180 ...