Micro-Optoelectromechanical Tilt Sensor

dc.contributor.author	Georgiou, J.	en
dc.contributor.author	Constandinou, Timothy G.	en
dc.creator	Georgiou, J.	en
dc.creator	Constandinou, Timothy G.	en
dc.date.accessioned	2019-04-08T07:45:58Z
dc.date.available	2019-04-08T07:45:58Z
dc.date.issued	2008
dc.identifier.uri	http://gnosis.library.ucy.ac.cy/handle/7/43497
dc.description.abstract	This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5â resolution over a 300â range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5â mm Ã 2.5â mm.	en
dc.source	Journal of Sensors, Vol 2008 (2008)	en
dc.subject	Technology	en
dc.subject	Technology (general)	en
dc.subject	Technology and engineering	en
dc.title	Micro-Optoelectromechanical Tilt Sensor	en
dc.type	info:eu-repo/semantics/article
dc.identifier.doi	10.1155/2008/782764
dc.description.issue	Journal Article	en
dc.author.faculty	Πολυτεχνική Σχολή / Faculty of Engineering
dc.author.department	Τμήμα Ηλεκτρολόγων Μηχανικών και Μηχανικών Υπολογιστών / Department of Electrical and Computer Engineering
dc.type.uhtype	Article	en
dc.contributor.orcid	Georgiou, J. [0000-0002-7474-5449]
dc.gnosis.orcid	0000-0002-7474-5449

Files in this item

Files	Size	Format	View
There are no files associated with this item.