Browsing by Author "Stevenson, P."

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    • Article  

      Active process control of reactive sputter deposition 

      Voevodin, A. A.; Stevenson, P.; Rebholz, Claus; Schneider, J. M.; Matthews, A. (1995)
      Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of ...
    • Article  

      Wear resistant composite coatings deposited by electron enhanced closed field unbalanced magnetron sputtering 

      Voevodin, A. A.; Rebholz, Claus; Schneider, J. M.; Stevenson, P.; Matthews, A. (1995)
      There is presently considerable interest in wear resistant coatings produced using closed field unbalanced magnetron sputtering technology. For example, layered films of diamond-like carbon (DLC) with tungsten or titanium ...