• Article  

      Structure, mechanical and tribological properties of sputtered TiAlBN thin films 

      Rebholz, Claus; Schneider, J. M.; Voevodin, A. A.; Steinebrunner, J.; Charitidis, C.; Logothetidis, S.; Leyland, A.; Matthews, A. (1999)
      TiAlBN films were produced by simultaneously sputtering from TiAl and TiB2 targets in Ar/N2 mixtures at a substrate temperature of 150 °C. The goal of this investigation was to study the influence of the nitrogen content ...