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Correlation of elastic modulus, hardness and density for sputtered TiAlBN thin films

dc.contributor.authorRebholz, Clausen
dc.contributor.authorLeyland, A.en
dc.contributor.authorMatthews, A.en
dc.contributor.authorCharitidis, C.en
dc.contributor.authorLogothetidis, S.en
dc.contributor.authorSchneider, D.en
dc.creatorRebholz, Clausen
dc.creatorLeyland, A.en
dc.creatorMatthews, A.en
dc.creatorCharitidis, C.en
dc.creatorLogothetidis, S.en
dc.creatorSchneider, D.en
dc.date.accessioned2019-05-06T12:24:25Z
dc.date.available2019-05-06T12:24:25Z
dc.date.issued2006
dc.identifier.urihttp://gnosis.library.ucy.ac.cy/handle/7/48752
dc.description.abstractThis paper describes the correlation between the elastic modulus, hardness and density of mainly X-ray amorphous TiAlxByNz (0.29 ≤ x ≤ 1.32en
dc.description.abstract1.15 ≤ y ≤ 2.07en
dc.description.abstract0.37 ≤ z ≤ 2.19) films, deposited by simultaneous reactive magnetron sputtering from TiAl and TiB2 targets onto AISI 316 stainless steel and Si(100) substrates in Ar/N2 mixtures at 150 °C. The elastic modulus, hardness and density were found to depend on chemical composition and the phases present, and an approximately linear correlation between elastic modulus and hardness could be established. The elastic modulus and hardness were also found to be a function of film density, except in films containing significant amounts of BN. © 2006 Elsevier B.V. All rights reserved.en
dc.language.isoengen
dc.sourceThin Solid Filmsen
dc.subjectThermal effectsen
dc.subjectMagnetron sputteringen
dc.subjectThin filmsen
dc.subjectElastic modulien
dc.subjectPhysical vapor depositionen
dc.subjectTitanium compoundsen
dc.subjectAmorphous filmsen
dc.subjectSputteringen
dc.subjectStainless steelen
dc.subjectHardnessen
dc.subjectReactive magnetron sputteringen
dc.subjectAISI 316 stainless steelen
dc.subjectArgonen
dc.subjectElastic propertiesen
dc.subjectFilm densityen
dc.subjectPhysical vapour deposition (PVD)fr
dc.titleCorrelation of elastic modulus, hardness and density for sputtered TiAlBN thin filmsen
dc.typeinfo:eu-repo/semantics/article
dc.identifier.doi10.1016/j.tsf.2006.02.038
dc.description.volume514
dc.description.startingpage81
dc.description.endingpage86
dc.author.facultyΠολυτεχνική Σχολή / Faculty of Engineering
dc.author.departmentΤμήμα Μηχανικών Μηχανολογίας και Κατασκευαστικής / Department of Mechanical and Manufacturing Engineering
dc.type.uhtypeArticleen
dc.description.totalnumpages81-86


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