Active process control of reactive sputter deposition
Ημερομηνία
1995Συγγραφέας
Voevodin, A. A.Stevenson, P.
Rebholz, Claus
Schneider, J. M.
Matthews, A.
Source
VacuumVolume
46Pages
723-729Google Scholar check
Keyword(s):
Metadata
Εμφάνιση πλήρους εγγραφήςΕπιτομή
Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of multilayer and multi-component coatings requires the independent control of deposited flux parameters using fast response and reliable control systems. A review of recent advances in process control showed the potential of techniques such as unbalanced magnetron sputtering in a closed magnetic field configuration, thermionically enhanced deposition and closed loop control with optical gas and metal plasma emission monitoring. These techniques were combined in an active control system. Special software was used to provide automatic computer aided process control in the deposition of multilayer and multi-component coatings. The system has been evaluated on a range of refractory and DLC coatings and recommendations on process control are given. © 1995.
Collections
Cite as
Related items
Showing items related by title, author, creator and subject.
-
Conference Object
A scalable iterative convex design for nonlinear systems
Baldi, S.; Ioannou, Petros A.; Kosmatopoulos, E. B. (2012)A recently developed control scheme for approximately optimal control of nonlinear systems is the so-called Convex Control Design (ConvCD) methodology, that transforms the control problem of generic nonlinear systems into ...
-
Article
Multiple model adaptive control with mixing
Kuipers, M.; Ioannou, Petros A. (2010)Despite the remarkable theoretical accomplishments and successful applications of adaptive control, the field is not sufficiently mature to solve challenging control problems where strict performance and robustness guarantees ...
-
Article
Convex design control for practical nonlinear systems
Baldi, S.; Michailidis, I.; Kosmatopoulos, E. B.; Papachristodoulou, A.; Ioannou, Petros A. (2014)This paper describes a new control scheme for approximately optimal control (AOC) of nonlinear systems, convex control design (ConvCD). The key idea of ConvCD is to transform the approximate optimal control problem into a ...