Photomodulated thermoreflectance investigation of semiconducting implanted wafers
Date
1998ISSN
0167-9317Source
Electrical and Physical CharacterizationVolume
40Issue
3Pages
251-261Google Scholar check
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Abstract The non contact character of the photothermal technique makes it particularly attractive for the nondestructive evaluation of implanted materials. Photomodulated thermoreflectance (PMTR) can detect local variation in the reflectivity of the material caused by the modulated excursions of the surface temperature and plasma surface concentration. These measurements allow the estimation of certain characteristics such as local electronic, optical, and thermal parameters. In the case of implanted semiconductors, PMTR provides an indication of local degree of damage. "