Browsing by Author "Boussey-Said, J."
Now showing items 1-1 of 1
-
Article
Raman spectroscopy and spreading resistance analysis of phosphorus implanted and annealed silicon
Othonos, Andreas S.; Christofides, Constantinos; Boussey-Said, J.; Bisson, M. (1994)Raman and electrical characterization measurements are performed in order to study the effects of thermal annealing on phosphorus implanted silicon wafers. The silicon layers were implanted for various implantation energies ...