Browsing by Subject "Bruggeman effective medium approximation"
Now showing items 1-1 of 1
-
Article
Ellipsometric analysis of ion-implanted polycrystalline silicon films before and after annealing
(2006)A study of arsenic ion-implanted polycrystalline silicon films before and after annealing at various temperatures has been performed using spectroscopic ellipsometry in the ultraviolet to the visible spectral region. Using ...