Browsing by Subject "Ion implantation"
Now showing items 1-5 of 5
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Book
Effect of disorder and defects in ion-implanted semiconductors : electrical and physico-chemical characterization
(Academic Press, 1997)
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Book
Effect of disorder and defects in ion-implanted semiconductors : optical and photothermal characterization
(Academic Press, 1997)
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Article
Ellipsometric analysis of ion-implanted polycrystalline silicon films before and after annealing
(2006)A study of arsenic ion-implanted polycrystalline silicon films before and after annealing at various temperatures has been performed using spectroscopic ellipsometry in the ultraviolet to the visible spectral region. Using ...
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Book
Semiconductors and semimetals. : optical and photothermal characterization / volume editors: Constantinos Christofides, Gérard Ghibaudo
(Academic Press, 1997)
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Article
Study of the annealing kinetic effect and implantation energy on phosphorus-implanted silicon wafers using spectroscopic ellipsometry
(2006)In this work, we have studied the changes in the optical properties on crystalline silicon implanted wafers (1 × 1013-1 × 1016 P+/cm2) using an extensive ellipsometric analysis. The effects of implantation energy (20-180 ...