Browsing by Subject "SI(100) WAFERS"
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Article
Optical and structural properties of implanted Si wafers: the effects of implantation energy and subsequent isochronal annealing temperature
(2006)We have studied the influence of implantation energy and subsequent isochronal annealing temperature on the optical and structural properties of implanted Si wafers employing a multiwavelength spectroscopic ellipsometer. ...