Browsing by Subject "THERMAL WAVE TECHNOLOGY"
Now showing items 1-2 of 2
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Article
Annealing Kinetics of Defects of Ion-Implanted and Furnace-Annealed Silicon Layers - Thermodynamic Approach
(1992)This article reviews some recent results concerning the effects of isochronal annealing and the attempts to model the kinetics of local reconstruction mechanisms of layers with different degrees of inhomogeneity such as ...
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Article
Photomodulated thermoreflectance investigation of implanted wafers. Annealing kinetics of defects
(1997)