Browsing by Author "IA Vitkin"
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Article
Photothermal Reflectance Investigation of Implanted Silicon
IA Vitkin; Christofides, Constantinos; Mandelis, Andreas (1990)ABSTRACT Silicon films damaged by ion implantation have been examined using the Photothermal Reflectance (PTR) technique. Data are presented on the sensitivity of this method to the implant parameters such as dose and ...
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Article
Study of the induced damage and of the annealing kinetics of defects in ion implanted silicon using the photothermal reflectance technique
IA Vitkin; Christofides, Constantinos; Mandelis, Andreas (1990)Abstract Study of the annealing kinetics of defects in ion implanted silicon using the photothermal reflectance technique has been performed. The strong influence of the implant dose and of the annealing temperature on the ...
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Article
Temperature effect on photothermal reflectance signal: application to ion implanted and amorphous silicon
Christofides, Constantinos; IA Vitkin; Mandelis, Andreas (1990)Abstract Photothermal reflectance study as a function of temperature of processed silicon (crystalline, ion-implanted, amorphous) has been performed for the first time. The influence of the substrate on the observed signal ...