Browsing by Subject "Implantation energy"
Now showing items 1-1 of 1
-
Article
Study of the annealing kinetic effect and implantation energy on phosphorus-implanted silicon wafers using spectroscopic ellipsometry
(2006)In this work, we have studied the changes in the optical properties on crystalline silicon implanted wafers (1 × 1013-1 × 1016 P+/cm2) using an extensive ellipsometric analysis. The effects of implantation energy (20-180 ...