Aleksandrova, M.; Tsanev, T.; Dobrikov, G.; Kolev, G.; Sophocleous, M.; Georgiou, Julius; Denishev, K. (2019)
In this study, lead-free, piezoelectric devices were fabricated by vacuum radiofrequency (RF) sputtering of Ga–doped, ZnO (GZO) nanocoatings at different deposition modes on silicon substrates. Several deposition rates ...