Browsing Τμήμα Ηλεκτρολόγων Μηχανικών και Μηχανικών Υπολογιστών / Department of Electrical and Computer Engineering by Author "Dobrikov, G."

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    • Article  

      Sputtering of Ga-doped ZnO nanocoatings on silicon for piezoelectric transducers 

      Aleksandrova, M.; Tsanev, T.; Dobrikov, G.; Kolev, G.; Sophocleous, M.; Georgiou, Julius; Denishev, K. (2019)
      In this study, lead-free, piezoelectric devices were fabricated by vacuum radiofrequency (RF) sputtering of Ga–doped, ZnO (GZO) nanocoatings at different deposition modes on silicon substrates. Several deposition rates ...