| dc.contributor.author | Farrington, N. E. S. | en |
| dc.contributor.author | Iezekiel, Stavros | en |
| dc.creator | Farrington, N. E. S. | en |
| dc.creator | Iezekiel, Stavros | en |
| dc.date.accessioned | 2019-04-08T07:45:51Z | |
| dc.date.available | 2019-04-08T07:45:51Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | http://gnosis.library.ucy.ac.cy/handle/7/43425 | |
| dc.source | Journal of Micro/Nanolithography, MEMS, and MOEMS | en |
| dc.source.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-79955968641&doi=10.1117%2f1.3563599&partnerID=40&md5=323a216add5005eee5510cf454582949 | |
| dc.title | Accurate layer thickness control and planarization for multilayer SU-8 structures | en |
| dc.type | info:eu-repo/semantics/article | |
| dc.identifier.doi | 10.1117/1.3563599 | |
| dc.description.volume | 10 | |
| dc.description.issue | 1 | |
| dc.author.faculty | Πολυτεχνική Σχολή / Faculty of Engineering | |
| dc.author.department | Τμήμα Ηλεκτρολόγων Μηχανικών και Μηχανικών Υπολογιστών / Department of Electrical and Computer Engineering | |
| dc.type.uhtype | Article | en |
| dc.source.abbreviation | J.Micro/ Nanolithogr.MEMS MOEMS | en |
| dc.contributor.orcid | Iezekiel, Stavros [0000-0002-5933-3489] | |
| dc.gnosis.orcid | 0000-0002-5933-3489 | |
