Micro-Optoelectromechanical Tilt Sensor
Date
2008Source
Journal of Sensors, Vol 2008 (2008)Issue
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This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5â resolution over a 300â range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5â mm à 2.5â mm.