Browsing by Author "Vitkin, I. A."
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Article
Laser-induced photothermal reflectance investigation of silicon damaged by arsenic ion implantation: A temperature study
Vitkin, I. A.; Christofides, Constantinos; Mandelis, Andreas (1989)Laser-induced photothermal reflectance (PTR) measurements of arsenic-implanted silicon are reported. The photothermal signals as a function of temperature are presented for both annealed and as-implanted silicon films. The ...
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Article
Photothermal reflectance investigation of processed silicon. I. Room-temperature study of the induced damage and of the annealing kinetics of defects in ion-implanted wafers
Christofides, Constantinos; Vitkin, I. A.; Mandelis, Andreas (1990)Silicon films damaged by ion implantation have been examined using the photothermal reflectance technique in the thermal wave regime (low-modulation frequencies, large laser beam spot sizes). Data are presented on the ...