Browsing by Subject "PROCESSED SILICON"
Now showing items 1-4 of 4
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Article
Annealing Kinetics of Defects of Ion-Implanted and Furnace-Annealed Silicon Layers - Thermodynamic Approach
(1992)This article reviews some recent results concerning the effects of isochronal annealing and the attempts to model the kinetics of local reconstruction mechanisms of layers with different degrees of inhomogeneity such as ...
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Article
High-temperature photomodulated thermoreflectance measurements on phosphorus implanted and annealed silicon wafers
(2003)Photomodulated thermoreflectance measurements between 300 and 650 K on phosphorus implanted and annealed silicon wafers are reported. The change of the photothermal amplitude and phase as a function of temperature is ...
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Article
Photomodulated thermoreflectance investigation of implanted wafers. Annealing kinetics of defects
(1997)
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Article
Photothermal Reflectance Investigation of Implanted Silicon - the Influence of Thermal Annealing
(1995)