• Article  

      Deposition and nanotribological characterization of Sub-100-nm thick protective Ti-based coatings for miniature applications 

      Polychronopoulou, K.; Lee, J.; Tsotsos, C.; Demas, N. G.; Meschewski, R. L.; Rebholz, Claus; Polycarpou, A. A. (2011)
      Ti-based protective thin films with thicknesses below 100 nm, intended for miniature applications were deposited using physical vapor deposition magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy, ...
    • Conference Object  

      Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings 

      Polychronopoulou, K.; Rebholz, Claus; Theodorou, L.; Böbel, K.; Demas, N. G.; Polycarpou, A. A. (Affiliation: Dept. of Mechanical and Manufacturing Engineering, University of Cyprus, 1678, Nicosia, CyprusAffiliation: Dept. PA-ATM01/SGP21, Engineering Process Technology, Robert Bosch GmbH, Postfach 300220, 70442 Stuttgart, GermanyAffiliation: Dept. of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, United StatesCorrespondence Address: Polycarpou, A. A.Dept. PA-ATM01/SGP21, Engineering Process Technology, Robert Bosch GmbH, Postfach 300220, 70442 Stuttgart, Germanyemail: polycarp@uiuc.edu, 2008)
      This study describes the correlation between the microstructure, mechanical and tribological properties of Ti 1-xCx coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target ...
    • Article  

      Nanostructure, mechanical and tribological properties of reactive magnetron sputtered TiCx coatings 

      Polychronopoulou, K.; Rebholz, Claus; Baker, M. A.; Theodorou, L.; Demas, N. G.; Hinder, S. J.; Polycarpou, A. A.; Doumanidis, C. C.; Böbel, K. (2008)
      This study describes the correlation between microstructure, mechanical and tribological properties of TiCx coatings (with x being in the range of 0-1.4), deposited by reactive magnetron sputtering from a Ti target in ...
    • Article  

      Wear resistant composite coatings deposited by electron enhanced closed field unbalanced magnetron sputtering 

      Voevodin, A. A.; Rebholz, Claus; Schneider, J. M.; Stevenson, P.; Matthews, A. (1995)
      There is presently considerable interest in wear resistant coatings produced using closed field unbalanced magnetron sputtering technology. For example, layered films of diamond-like carbon (DLC) with tungsten or titanium ...