Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings
Demas, N. G.
Polycarpou, A. A.
PublisherAffiliation: Dept. of Mechanical and Manufacturing Engineering, University of Cyprus, 1678, Nicosia, Cyprus
Affiliation: Dept. PA-ATM01/SGP21, Engineering Process Technology, Robert Bosch GmbH, Postfach 300220, 70442 Stuttgart, Germany
Affiliation: Dept. of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, United States
Correspondence Address: Polycarpou, A. A.
Dept. PA-ATM01/SGP21, Engineering Process Technology, Robert Bosch GmbH, Postfach 300220, 70442 Stuttgart, Germany
Source2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
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This study describes the correlation between the microstructure, mechanical and tribological properties of Ti 1-xCx coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target in Ar/C2H2 mixtures at -200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and highest hardness and elastic modulus, combined with low wear rates, were observed for films with chemical composition close to TiC. X-ray diffraction (XRD) studies showed that the coating deposited at high C2H 2 flow rates composed of randomly oriented TiC crystallites. Morphological investigations by scanning electron microscopy (SEM) indicate that the morphology is strongly dependent on the carbon content of the coating. Coatings composition and bonding environment was investigated using X-ray photoelectron spectroscopy (XPS). Both the mechanical properties and tribological performance of the coatings were found to be dependent on carbon content. Copyright © 2007 by ASME.