Optical properties of amorphous C/diamond thin films
AuthorSilva, S. R. P.
Amaratunga, G. A. J.
Constantinou, Constaninos P.
SourceJournal of Applied Physics
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Amorphous C/diamond films have been prepared by rf plasma enhanced vapor deposition from a CH4/Ar gas mixture. Infrared and optical-ultraviolet absorption characteristics are reported and used to characterize the bonding and optical properties of these films. It has been found that the optical band gap is not related to the hydrogen content in the films and varies according to the dc self bias developed during deposition. The IR data show that the hydrogen in the a-C/diamond films is associated with triply bonded sp1 carbon as in acetelyne. The optical band gap of the films can be varied from 1.2-4.0 eV.