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Δημοσιεύσεις ΠΚ / UCY Publications
007 Πολυτεχνική Σχολή / Faculty of Engineering
Τμήμα Ηλεκτρολόγων Μηχανικών και Μηχανικών Υπολογιστών / Department of Electrical and Computer Engineering
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Δημοσιεύσεις ΠΚ / UCY Publications
007 Πολυτεχνική Σχολή / Faculty of Engineering
Τμήμα Ηλεκτρολόγων Μηχανικών και Μηχανικών Υπολογιστών / Department of Electrical and Computer Engineering
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Article
Accurate layer thickness control and planarization for multilayer SU-8 structures
Date
2011
Author
Farrington, N. E. S.
Iezekiel, Stavros
Source
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
10
Issue
1
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-79955968641&doi=10.1117%2f1.3563599&partnerID=40&md5=323a216add5005eee5510cf454582949
DOI
10.1117/1.3563599
URI
http://gnosis.library.ucy.ac.cy/handle/7/43425
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Τμήμα Ηλεκτρολόγων Μηχανικών και Μηχανικών Υπολογιστών / Department of Electrical and Computer Engineering
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