Ziegele, H.; Rebholz, Claus; Voevodin, A. A.; Leyland, A.; Rohde, S. L.; Matthews, A. (1997)
Multilayer CrC-SiC coatings were produced by both direct current and radio frequency sputtering of Cr and Si targets in an Ar-C2H2 atmosphere. Coatings of constant thickness of about 4 μm, but with the number of layers ...