Polychronopoulou, K.; Lee, J.; Tsotsos, C.; Demas, N. G.; Meschewski, R. L.; Rebholz, Claus; Polycarpou, A. A. (2011)
Ti-based protective thin films with thicknesses below 100 nm, intended for miniature applications were deposited using physical vapor deposition magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy, ...