Search
Now showing items 1-2 of 2
Wear resistant composite coatings deposited by electron enhanced closed field unbalanced magnetron sputtering
(1995)
There is presently considerable interest in wear resistant coatings produced using closed field unbalanced magnetron sputtering technology. For example, layered films of diamond-like carbon (DLC) with tungsten or titanium ...
Active process control of reactive sputter deposition
(1995)
Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of ...