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Structure, mechanical and tribological properties of sputtered TiAlBN thin films
(1999)
TiAlBN films were produced by simultaneously sputtering from TiAl and TiB2 targets in Ar/N2 mixtures at a substrate temperature of 150 °C. The goal of this investigation was to study the influence of the nitrogen content ...
Wear resistant composite coatings deposited by electron enhanced closed field unbalanced magnetron sputtering
(1995)
There is presently considerable interest in wear resistant coatings produced using closed field unbalanced magnetron sputtering technology. For example, layered films of diamond-like carbon (DLC) with tungsten or titanium ...