Si nanostructures grown by picosecond high repetition rate pulsed laser deposition

Abstract

One-step growth of n-doped Si nanostructures by picosecond ultra fast pulsed laser deposition at 1064nm is reported for the first time. The structure and morphology of the Si nanostructures were characterized by X-ray diffraction, scanning electron microscopy and atomic force microscopy. Transmission electron microscopy studies revealed that the shape of the Si nanostructures depends on the ambient argon pressure. Fibrous networks, cauliflower formations and Si rectangular crystals grew when argon pressure of 300Pa, 30Pa and vacuum (10−3Pa) conditions were used, respectively. In addition, the electrical resistance of the vacuum made material was investigated.