Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering

Abstract

Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the deposition process, enabling the formation of a carbon enriched surface layer, which was then sputtered to produce DC-metal/metal-carbide composites. Target poisoning was controlled by plasma emission monitoring, and a hot filament was used to regulate the ion current to the substrates independently of the magnetron power and substrate bias. Coating morphology and composition were investigated using scanning electron microscopy and glow discharge optical emission spectroscopy.