Browsing by Subject "Magnetron sputtering"
Now showing items 1-12 of 12
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Article
Active process control of reactive sputter deposition
(1995)Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of ...
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Article
Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering
(1997)Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the ...
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Article
Correlation of elastic modulus, hardness and density for sputtered TiAlBN thin films
(2006)This paper describes the correlation between the elastic modulus, hardness and density of mainly X-ray amorphous TiAlxByNz (0.29 ≤ x ≤ 1.32
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Article
Deposition and characterization of nitrogen containing stainless steel coatings prepared by reactive magnetron sputtering
(1996)Nitrogen containing austenitic stainless steel coatings were deposited with nitrogen concentrations up to 14.1 at% using electron enhanced closed field unbalanced DC magnetron sputtering. The reactive gas flow was controlled ...
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Article
Indium oxide as a possible tunnel barrier in spintronic devices
(2005)We report the growth of ultra-thin indium oxide layers using the dc-magnetron sputtering method. We demonstrate that good quality tunnel barriers made of indium oxide can be routinely fabricated and employed in spintronic-related ...
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Conference Object
Microstructure, mechanical and tribological properties of reactive magnetron sputtered titanium carbide coatings
(Affiliation: Dept. of Mechanical and Manufacturing Engineering, University of Cyprus, 1678, Nicosia, CyprusAffiliation: Dept. PA-ATM01/SGP21, Engineering Process Technology, Robert Bosch GmbH, Postfach 300220, 70442 Stuttgart, GermanyAffiliation: Dept. of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, United StatesCorrespondence Address: Polycarpou, A. A.Dept. PA-ATM01/SGP21, Engineering Process Technology, Robert Bosch GmbH, Postfach 300220, 70442 Stuttgart, Germanyemail: polycarp@uiuc.edu, 2008)This study describes the correlation between the microstructure, mechanical and tribological properties of Ti 1-xCx coatings (with x being in the range of 0-0.5), deposited by reactive magnetron sputtering from a Ti target ...
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Nanostructure, mechanical and tribological properties of reactive magnetron sputtered TiCx coatings
(2008)This study describes the correlation between microstructure, mechanical and tribological properties of TiCx coatings (with x being in the range of 0-1.4), deposited by reactive magnetron sputtering from a Ti target in ...
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Article
Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings
(2010)This paper reports on the structure and mechanical properties of 2μm thick nanocomposite (nc-) Ti(N,C)/amorphous diamond like carbon (a-C:H) coatings deposited on 100Cr6 steel substrates, using low temperature ( 200°C) DC ...
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Article
Structure, mechanical and tribological properties of nitrogen-containing chromium coatings prepared by reactive magnetron sputtering
(1999)Cr(1-x)N(x) coatings were deposited by magnetron sputtering at a substrate temperature of 200°C onto AISI 316 stainless-steel substrates immersed in an Ar/N2 plasma. The goal of this investigation was to study the influence ...
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Article
Wear behaviour of carbon-containing tungsten coatings prepared by reactive magnetron sputtering
(1999)W(1-x)C(x) coatings (with x being in the range of 0.05-0.19) were deposited by reactive magnetron sputtering on to AISI 316 stainless-steel substrates in order to study the influence of the carbon content on the tribological ...
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Article
Wear resistant composite coatings deposited by electron enhanced closed field unbalanced magnetron sputtering
(1995)There is presently considerable interest in wear resistant coatings produced using closed field unbalanced magnetron sputtering technology. For example, layered films of diamond-like carbon (DLC) with tungsten or titanium ...
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Article
X-Ray diffraction investigations of magnetron sputtered TiCN coatings
(1995)X-ray diffraction measurements were performed on titanium carbonitride coatings produced in an electron enhanced, unbalanced magnetron system. The films were deposited onto AISI 316 stainless steel substrates with an argon ...