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Deposition and characterization of nitrogen containing stainless steel coatings prepared by reactive magnetron sputtering
(1996)
Nitrogen containing austenitic stainless steel coatings were deposited with nitrogen concentrations up to 14.1 at% using electron enhanced closed field unbalanced DC magnetron sputtering. The reactive gas flow was controlled ...
Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering
(1997)
Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the ...
Wear resistant composite coatings deposited by electron enhanced closed field unbalanced magnetron sputtering
(1995)
There is presently considerable interest in wear resistant coatings produced using closed field unbalanced magnetron sputtering technology. For example, layered films of diamond-like carbon (DLC) with tungsten or titanium ...
Active process control of reactive sputter deposition
(1995)
Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of ...