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Now showing items 11-12 of 12
Active process control of reactive sputter deposition
(1995)
Control of the density, composition, ionisation rate and arrival energy of species is one of the main objectives of research in the development of reactive magnetron sputtering. The deposition of the latest generation of ...
Studies of the tribological and mechanical properties of laminated CrC-SiC coatings produced by r.f. and d.c. sputtering
(1997)
Multilayer CrC-SiC coatings were produced by both direct current and radio frequency sputtering of Cr and Si targets in an Ar-C2H2 atmosphere. Coatings of constant thickness of about 4 μm, but with the number of layers ...