Growth and transport properties of HT-Li xCoO 2 thin films deposited by pulsed laser deposition
Athanasopoulos, G. I.
SourceApplied Surface Science
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The successful in situ growth of single phase, c-axis oriented, layered structured Li xCoO 2 thin films on (0 0 0 1) Al 2O 3 substrates by pulsed laser deposition is reported. Thin films were grown in an oxygen pressure of 1 mbar and substrate temperatures varying from 300 up to 600°C. It is found that the surface roughness and electrical resistance of the films depends strongly on the deposition temperatures. © 2012 Elsevier B.V.
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