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Δημοσιεύσεις ΠΚ / UCY Publications
002 Σχολή Θετικών και Εφαρμοσμένων Επιστημών / Faculty of Pure and Applied Sciences
Τμήμα Φυσικής / Department of Physics
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Δημοσιεύσεις ΠΚ / UCY Publications
002 Σχολή Θετικών και Εφαρμοσμένων Επιστημών / Faculty of Pure and Applied Sciences
Τμήμα Φυσικής / Department of Physics
View Item
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Article
Photomodulated thermoreflectance investigation of implanted wafers. Annealing kinetics of defects
Date
1997
Author
Christofides, Constantinos
ISSN
0080-8784
Source
Semiconductors and Semimetals
Volume
46
Pages
115-150
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Keyword(s):
BEAM THERMOWAVE ANALYSIS
ION-IMPLANTATION
OPTICAL REFLECTANCE
PROCESSED SILICON
ROOM-TEMPERATURE
SECONDARY DEFECTS
SEMICONDUCTOR WAFERS
SILICON-WAFERS
TEMPERATURE-DEPENDENCE
THERMAL WAVE TECHNOLOGY
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URI
http://gnosis.library.ucy.ac.cy/handle/7/58583
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Τμήμα Φυσικής / Department of Physics
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